To obtain a corrosion-proof window foil by using an aluminum-alloy foil as a metal foil and using what is formed by further coating a titanium layer coating the alloy foil with a hard coating as a window foil.
This device is equipped with an electron beam generating section 10 that extracts thermions emitted from a cathode as an electron beam and accelerates it, an irradiation chamber 20 where an object is irradiated with the electron beam and a window foil 32 that is used as a partition between a vacuum atmosphere in the electron beam generating section 10 and an irradiated atmosphere in the irradiation chamber 9 and extracts the electron beam. The window foil 32 is constituted by containing an aluminum-alloy foil, a titanium film for coating the surface of the aluminum-alloy foil on the side of the irradiation chamber and hard coatings for coating the titanium film. Consequently, the window foil 32 is obtained that has high electron beam transmissivity and is free from the occurrence of flaws in handling or the corrosion due to abrasion.
KOBAYASHI TOSHIRO
WAKAMOTO IKUO
URANO SUSUMU
KOUNO MASAKI
| JPS5983285A | 1984-05-14 | |||
| JPS5283132A | 1977-07-11 | |||
| JPS5892597A | 1983-06-01 | |||
| JPS61133489A | 1986-06-20 | |||
| JPS633998A | 1988-01-08 |