Title:
電子ビーム測定装置および電子ビーム測定方法
Document Type and Number:
Japanese Patent JP7157508
Kind Code:
B2
Abstract:
PURPOSE: To cut off an electron beam in real time a prescribed interval after an edge peak is detected in real time and suppress irradiation of a pattern to suppress the damage to or the shrinkage of the pattern pertaining to an electron beam measuring device and an electron beam measuring method.CONSTITUTION: The electron beam measuring device comprises setting means for setting a partial scan region, detection means for detecting a pattern edge in real time, electron beam OFF signal generation means for detecting an edge in real time and generating an electron beam OFF signal in real time after the elapse of a prescribed time, and electron beam cutoff means for cutting off an electron beam in real time when an electron beam OFF signal is generated and cutting off irradiation of the pattern, with the electron beam measuring device constituted so as to automatically acquire a minimum required image for measurement.SELECTED DRAWING: Figure 1
Inventors:
Keizo Yamada
Application Number:
JP2018187386A
Publication Date:
October 20, 2022
Filing Date:
October 02, 2018
Export Citation:
Assignee:
Holon Co., Ltd.
International Classes:
G01B15/00; G01B15/04; H01J37/22; H01L21/66
Domestic Patent References:
| JP2000321040A | ||||
| JP2017199453A |
Foreign References:
| WO2008111365A1 |
Attorney, Agent or Firm:
Morihiro Okada
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