Title:
ELECTRON BEAM METER
Document Type and Number:
Japanese Patent JPS53106162
Kind Code:
A
Abstract:
PURPOSE: To precisely measure the fine destance between two points by measuring the destance between two measured point images which are formed by the scanning irradiation of an electron beam.
Inventors:
NAKASUJI MAMORU
TAKIGAWA TADAHIRO
TAKIGAWA TADAHIRO
Application Number:
JP2136977A
Publication Date:
September 14, 1978
Filing Date:
February 28, 1977
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01B15/00; (IPC1-7): G01B15/00
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