PURPOSE: To make the test of large-scale and besides high-speed integrated circuits with many external pins up to several hundred easy by configuring a multiconductor printed wiring cable for electrical connection to a sample placed in a vacuum sample chamber and a vacuum flange air-tightly as one body and equipping a signal introducing device for taking signals out of the vacuum sample chamber.

CONSTITUTION: Fixing and vacuum sealing are conducted together by putting a printed wiring cable 24 through a hole provided on a stainless steel made vacuum flange 16 and pouring adhesive 17 into the hole. After attaching the vacuum flange 16 to the wall of a vacuum sample chamber 1 air-tightly, the pins of a socket 3 and the output lines of a test pattern generator are connected, being respectively attached directly to the pads 24 provided at both ends of a printed wiring cable 24, or connecting pins 25 attached directly to themselves being wrapped or done alike. Thereby, the test pattern generator 6 in the atmosphere can conduct electrically and supply electric signals to an integrated circuit sample 4 in the vacuum sample chamber 2.