ELECTRON BEAM TREATMENT DEVICE - USHIO ELECTRIC INC

Title:

ELECTRON BEAM TREATMENT DEVICE

Document Type and Number:

Japanese Patent JP2002182000

Kind Code:

A

Abstract:

To provide an electron beam treatment device which can treat the whole treatment area of an object to be treated in a lump even if the object is not moved by allowing electron beams to be applied from electron beam tubes to overlap well with each other to make a prescribed condition of a distribution of the absorbed dose in the whole treatment area of the object.

In the electron beam treatment device in this invention, the electron beam tubes 1 are located so that electron beam emitting windows 15 can be exposed in a treatment room 2 for treating the object W. The electron beam treatment device is characterized in that each of the electron beam tubes 1 is located so as to make a prescribed condition of a distribution of the absorbed dose in the whole treatment area of the object W.

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Inventors:

YAMAGUCHI MASANORI

Application Number:

JP2000379679A

Publication Date:

June 26, 2002

Filing Date:

December 14, 2000

Export Citation:

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Assignee:

USHIO ELECTRIC INC

International Classes:

G21K5/04; B01J19/12; B23K15/00; B29C35/08; C23C14/30; G21K5/00; H01J33/04; H01J37/30; H01L21/31; (IPC1-7): G21K5/04; B01J19/12; B23K15/00; C23C14/30; G21K5/00; H01L21/31

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