To realize an electron beam welding equipment that can suppress thermal deformation of an object to be welded in aligning a weld line with an electron beam generating source.
The beam spot of an electron beam and the laser spot of a laser beam 13, which is oscillated by a visible laser oscillator 6, are made to coincide with a point P by adjusting a laser beam reflection mirror 8. A CCD camera 10 is used to verify the adjustment of the reflection mirror 8, the beam spot is visibly confirmed, and the reflection angle or the like of the mirror 8 is adjusted and fixed. Then, an X-Y-θ table 4 is moved so that the welding starting position of the object 3 to be welded coincides with the laser beam spot 13; thereby weld line detection and alignment are performed. Thus, upon completion of the weld line detection and the alignment, welding starts for the object 3. The visible laser beam, unlike the electron beam, spends very little energy and is used without being converged; therefore, if the object 3 is irradiated with it, the object 3 is free from thermal deformation.
KOBAYASHI KAZU
ISHII HIDEAKI
