Title:
ELECTRON EMISSION ELEMENT, ELECTRON EMISSION ELEMENT ARRAY, CATHODE PLATE AND ITS MANUFACTURE AND FLAT-PANEL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP3526673
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce power consumption and increase response speed by having an emitter electrode layer, an emitter chip, and a gate electrode layer, and making the gate electrode and an emitter electrode cross mutually without any intervening substance between them.
SOLUTION: On an insulating board 5 of slits 2, gate opening portions 3, and windows 4, a conductive film is formed. Since the conductive film is separated from the adjoining conductive film of picture elements by a gate support film for emitter electrode layer separation 18, the same is used as an emitter electrode layer 8 as is. A conductive film 7 deposited on a gate support film 1 becomes a gate electrode layer later. When a sacrifice film 10 is dissolved by an acetic acid solution to remove negative feedback layer material 9a and emitter chip material 10 on the support film 1, the emitter chip 11 is exposed on the electrode layer 8 in the opening portions 3. The gate electrode layer is formed in a direction crossing the lower layer, the emitter electrode layer 8, but no insulator intervenes in the cross portion. That is, both electrode layers are insulated by a space in the slits 2.
Inventors:
Nakatani, Tadashi
Betsui, Keiichi
Fukuda, Shinya
Betsui, Keiichi
Fukuda, Shinya
Application Number:
JP26179395A
Publication Date:
May 17, 2004
Filing Date:
October 09, 1995
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01J1/30; H01J1/304; H01J3/02; H01J9/02; H01J29/04; H01J31/12; (IPC1-7): H01J1/30; H01J9/02; H01J31/12
Attorney, Agent or Firm:
野河 信太郎