Title:
ELECTRON EMISSION ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3631015
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enhance electron emission efficiency, realize high fineness, lower driving voltage, stabilize characteristics, and reduce dispersion of characteristics by laminating a lower electrode, an insulating layer having pores, and an upper electrode on a substrate in order, and forming carbon deposits in the pores.
SOLUTION: An insulating layer having pores 5 formed by anodization is formed on a lower electrode 2, and carbon is formed within the pore 5. When voltage is applied between the lower electrode 2 and an upper electrode 4 so as to raise the potential of the upper electrode 4, electrons injected from the lower electrode 2 are tunneled in the vacuum and emitted. Since the distance of a gap between carbon formed on the lower electrode 2 and the upper electrode 2 is almost constant, electron emission characteristics with low dispersion can be obtained. By using either one of graphite and amorphous carbon as an electron emitter grown from the lower electrode side, heat resistance is increased, and stable electron emitting characteristics are obtained in high reproducibility.
Inventors:
Masato Yamanobe
Takeo Tsukamoto
Shinichi Kawate
Takeo Tsukamoto
Shinichi Kawate
Application Number:
JP32234898A
Publication Date:
March 23, 2005
Filing Date:
November 12, 1998
Export Citation:
Assignee:
Canon Inc
International Classes:
H01J1/30; H01J1/304; H01J1/312; H01J1/316; H01J9/02; H01J29/04; H01J31/12; H01J31/38; (IPC1-7): H01J1/312; H01J29/04; H01J31/12
Domestic Patent References:
| JP5211030A | ||||
| JP7065710A | ||||
| JP9219149A | ||||
| JP5198252A | ||||
| JP10012124A |
Attorney, Agent or Firm:
Jyohei Yamashita
Previous Patent: ORGANIC EL ELEMENT AND MANUFACTURE THEREOF
Next Patent: X-RAY MASK BLANK, ITS MANUFACTURE, X-RAY MASK, AND MANUFACTURE THEREFOR
Next Patent: X-RAY MASK BLANK, ITS MANUFACTURE, X-RAY MASK, AND MANUFACTURE THEREFOR