Title:
ELECTRON GUN ADJUSTMENT AND THERMAL DISSIPATION IN VACUUM
Document Type and Number:
Japanese Patent JP2023017990
Kind Code:
A
Abstract:
To provide a vacuum device that has a mechanism to increase thermal dissipation (i.e., decrease thermal loading) in particular locations of an electron gun, such as a support structure or alignment features.SOLUTION: A vacuum device includes an enclosure 1200 configured to enclose a vacuum. The enclosure includes an external base 118 and an internal base 156 within the enclosure. The enclosure also includes an adjustable support assembly 1210 that adjustably couples the internal base to the external base and extends through an opening. The adjustable support assembly includes an internal base thermal conductive base 1220 in contact with the internal base, an external base thermal conductive base 1230 in contact with the external base, and a flexible thermal dissipating strap 1212 coupling the internal base thermal conductive base to the external base thermal conductive base.SELECTED DRAWING: Figure 11A
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Inventors:
ferrari chris
Bemis Thomas
Bemis Thomas
Application Number:
JP2022183144A
Publication Date:
February 07, 2023
Filing Date:
November 16, 2022
Export Citation:
Assignee:
Valex Imaging Corporation
International Classes:
H01J23/12; H01J37/06
Attorney, Agent or Firm:
Patent Attorney Corporation RYUKA International Patent Office