Title:
ELECTRON GUN OF ION-PLASMA TYPE AND METHOD FOR MANUFACTURING IT
Document Type and Number:
Japanese Patent JP3178658
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make it difficult to be spattered by plasma and make it possible to cool a window foil well by forming a metal coating with a low spatter rate on the plasma-exposed surface of a window support with many window holes in a plasma chamber made of a metal of good heat conductivity and sealing the outside of the window support with the window foil airtightly.
SOLUTION: A plasma chamber 14 is connected below a vacuum chamber 11. A window support 15 that has many openings and coolant passages like a grid 18 placed on the top of the plasma chamber 14 is placed on the bottom face of the plasma chamber 14, a metal coating of a low spatter rate is formed on the surface of it exposed to plasma 40, and a window foil 16 made of a thin foil such as Ti and Al is airtightly placed on the outer surface of the window support 15. Then, the whole window support 15 can be cooled efficiently by running a coolant into the coolant passages. Since the space above the window foil 16 placed on the bottom face of the window support 15 is filled with a vacuum atmosphere and the atmospheric pressure is created below the window foil 16, the window foil 16 can be also cooled efficiently together with the window support 15.
Inventors:
Hiroki Suezawa
Yukio Kumada
Yukio Kumada
Application Number:
JP13710797A
Publication Date:
June 25, 2001
Filing Date:
May 27, 1997
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
G21K5/00; G21K5/10; H01J33/04; G21K5/04; H01J37/073; (IPC1-7): G21K5/04; H01J33/04; H01J37/073
Domestic Patent References:
| JP5223998A | ||||
| JP720297A | ||||
| JP1110400U |
Attorney, Agent or Firm:
Keishiro Takahashi (2 outside)