Title:
ELECTRON MICROCOPE
Document Type and Number:
Japanese Patent JP3020157
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a new electron microscope capable of observing a specimen with high resolution, under low and the high temperature environment.
SOLUTION: A means for applying a pulse voltage 36, a microchannel plate 4, a CCD camera 6 are provided, and a pulse voltage with a short time width is applied to the microchannel plate 4 by the means for applying a pulse voltage. An electron microscope image 3 inputted in the microchannel plate 4 is then successively outputted at intervals of the short time width of the pulse voltage applied, and the successively electron microscope images 3 with this interval of the short time width are photographed sequentially with the CCD camera 6.
Inventors:
Kimoto, Takayoshi
Application Number:
JP1998000274098
Publication Date:
January 14, 2000
Filing Date:
September 28, 1998
Export Citation:
Assignee:
Natl, Res Inst For Metals
International Classes:
H01J37/22; H01J37/244; H01J37/26; (IPC1-7): H01J37/22; H01J37/244; H01J37/26