Title:
電子源とその製造方法およびそれを用いた電子線装置
Document Type and Number:
Japanese Patent JP7403678
Kind Code:
B2
Abstract:
The current stability of a field emission electron source and a Schottky electron source where a {100} plane of a hexaboride single crystal is used as an electron emission surface is improved. The electron source includes a tip of a hexaboride single crystal with a <100> axis, in which a top facet of a {100} plane that is surrounded by side facets including at least four {n11} planes and at least four {n10} planes where n represents an integer of 1, 2, or 3 is formed at a front end of the tip of the hexaboride single crystal, and a total area of the side facets of the {n11} planes is more than a total area of the side facets of the {n10} planes.
Inventors:
Toshiaki Kusunoki
Noriaki Arai
Tomihiro Hashizume
Keigo Kasuya
Noriaki Arai
Tomihiro Hashizume
Keigo Kasuya
Application Number:
JP2022551462A
Publication Date:
December 22, 2023
Filing Date:
September 23, 2020
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J1/30; H01J9/02; H01J37/06
Domestic Patent References:
| JP57141839A | ||||
| JP60031059A | ||||
| JP52110563A |
Attorney, Agent or Firm:
Polaire Patent Attorneys Corporation