Title:
電子吸引性基含有単量体及びその製造法
Document Type and Number:
Japanese Patent JP4052943
Kind Code:
B2
Abstract:
A monomer containing an electron-withdrawing group of the present invention is represented by following Formula (a), (b) or (c): wherein A1, A2, and A3 are each a ring; Ra, Rb, Rc, and Ru are the same or different and are each a hydrogen atom or organic group; at least one of Rs, Rw and Rv, at least one of Rt and Rw1, and at least one of the two Rw2s are each an electron-withdrawing group, and the others are each a hydrogen atom or organic group; W1 is a single bond or linkage group; and n denotes an integer of 2 to 25, where at least two of Ra, Rb, Rc, Rs, Rt, Ru, Rv, Rw, Rw1, Rw2, W1, and carbon atoms constituting ring A1, carbon atoms constituting ring A2, and carbon atoms constituting ring A3 may be combined to form a ring, respectively. The electron-withdrawing groups in Rs, Rt, Rv, Rw, Rw1, and Rw2 are, for example, groups each containing a fluorine atom. The monomer is useful as a raw material for photoresist polymeric compounds.
Inventors:
Keizo Inoue
Application Number:
JP2002539295A
Publication Date:
February 27, 2008
Filing Date:
October 31, 2001
Export Citation:
Assignee:
Daicel Chemical Industry Co., Ltd.
International Classes:
C07C43/172; C07C29/40; C07C33/44; C07C35/52; C07C41/01; C07C41/06; C07C41/58; C07C43/178; C07C43/192; C07C43/196; C07C43/313; C07C45/64; C07C45/66; C07C45/68; C07C49/453; C07C49/513; C07C49/653; C07C49/755; C07D307/00; C07D307/30; C07D307/93; C07D311/94; C07D313/10; C07D317/42; C07D339/06; C08F24/00; G03F7/004; G03F7/039; C08F16/24; C08F32/08; C08F34/02; H01L21/027
Domestic Patent References:
| JP2002201219A | ||||
| JP64022866A |
Other References:
J.Burdon & I.W.Parsons,Highly Fluorinated Heterocycles - VII,Tetrahedron,1977年,Vol.27,4533-4551
A.K.M.Fazlul Huqueほか,Synthesis of Some Substituted Adamantane-2,4-diones,J. CHEM. RES., SYNOP.,1987年,N7,P214
Guenther Snatzkeほか,Synthese und Circulardichroismus von einigen β-substituierten Adamantanonen, III,Chem. Ber.,1972年,V105N1,P244-256
A.K.M.Fazlul Huqueほか,Synthesis of Some Substituted Adamantane-2,4-diones,J. CHEM. RES., SYNOP.,1987年,N7,P214
Guenther Snatzkeほか,Synthese und Circulardichroismus von einigen β-substituierten Adamantanonen, III,Chem. Ber.,1972年,V105N1,P244-256
Attorney, Agent or Firm:
Yukihisa Goto