Title:
電子増幅器、検出素子及び検出装置
Document Type and Number:
Japanese Patent JP7342722
Kind Code:
B2
Abstract:
To provide a gas electron multiplier which is hard to discharge even if an electric field is increased to improve detection accuracy.SOLUTION: A gas electron multiplier includes: a base material 35 in which a plurality of through holes 38 from a front face to a rear face are provided; a first electrode 31 located on the rear face of the base material 35; and a second electrode 32 located on the front face of the base material, the second electrode at least partially overlapping with the first electrode 31 in the thickness direction of the base material. The base material 35 includes: a first dielectric layer 36 electrically connected to the first electrode 31; and a second dielectric layer 37 located between the first dielectric layer 36 and the second electrode 32, the second dielectric layer being electrically connected to the first dielectric layer 36. The relative permittivity εr1 of the first dielectric layer 36 and the relative permittivity εr2 of the second dielectric layer 37 satisfy the relationship of εr1<εr2.SELECTED DRAWING: Figure 1
Inventors:
Osamu Shimada
Tomohisa Motomura
Kohei Ota
Hikaru Abe
Atsushi Takada
Toru Tanimori
Tomohisa Motomura
Kohei Ota
Hikaru Abe
Atsushi Takada
Toru Tanimori
Application Number:
JP2020013565A
Publication Date:
September 12, 2023
Filing Date:
January 30, 2020
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01J47/06; G01T1/18
Domestic Patent References:
| JP2018142543A | ||||
| JP2007234485A | ||||
| JP2002541488A | ||||
| JP2000285791A |
Foreign References:
| US20200096653 | ||||
| WO2010123887A2 |
Attorney, Agent or Firm:
Yukitaka Nakamura
Satoru Asakura
Yukihiro Hotta
Kazuo Okamura
Satoru Asakura
Yukihiro Hotta
Kazuo Okamura
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