Title:
電子装置
Document Type and Number:
Japanese Patent JP3909086
Kind Code:
B2
Inventors:
Yutaka Akiba
Horikoshi Kazuhiko
Toshiyuki Arai
Horikoshi Kazuhiko
Toshiyuki Arai
Application Number:
JP52744596A
Publication Date:
April 25, 2007
Filing Date:
March 15, 1995
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/822; H01L23/552; H01L23/64; H01L27/04
Domestic Patent References:
| JP5055380A | ||||
| JP3239357A | ||||
| JP5235275A | ||||
| JP3142865A |
Attorney, Agent or Firm:
Manabu Inoue