Title:
電子装置製造装置
Document Type and Number:
Japanese Patent JP5435613
Kind Code:
B2
Inventors:
Tadahiro Ohmi
Kitano Masashi
Minoru Tahara
Tomohashi Ohashi
Takaaki Matsuoka
Kitano Masashi
Minoru Tahara
Tomohashi Ohashi
Takaaki Matsuoka
Application Number:
JP2008327018A
Publication Date:
March 05, 2014
Filing Date:
December 24, 2008
Export Citation:
Assignee:
Tohoku University
International Classes:
H01L21/304; C22C21/00; C23C28/00; C25D11/14; C25D11/18
Domestic Patent References:
| JP2005136437A | ||||
| JP2000144292A | ||||
| JP2004149927A | ||||
| JP2007287876A | ||||
| JP2004193172A |
Foreign References:
| WO2006134737A1 |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda