Title:
電子式高集積化モジュール及び電子式流体制御装置
Document Type and Number:
Japanese Patent JP3976571
Kind Code:
B2
Inventors:
Kazuaki Takahashi
Junichi Nakamura
Akihiro Kudo
Junichi Nakamura
Akihiro Kudo
Application Number:
JP2002016900A
Publication Date:
September 19, 2007
Filing Date:
January 25, 2002
Export Citation:
Assignee:
Industria Co., Ltd.
International Classes:
G01F1/36; B81B7/00; G05D7/06; G05D16/20
Domestic Patent References:
| JP3065608U | ||||
| JP2001133302A | ||||
| JP6201420A | ||||
| JP4256810A |
Attorney, Agent or Firm:
Toshio Tsuruwaka