PURPOSE: To prevent a jam between belts and to cope with the situation with flexibility by providing plural jigs for clamping and moving electronic parts on a path set longer than the distance between inlet and outlet gates of a processing chamber, whereby the electronic parts are sequentially fed into the processing chamber through the inlet gate by a driving device, to be subjected to designated processing while being transported to the outlet gate and discharged.

CONSTITUTION: A jig 3 holding a lead frame state electronic part discharged from a loader 1 is clamped between driving belts 2 and pushed into a transport rail 5. The transport rail 5 is formed by two L-shaped confronting plate-like materials longer than the processing chamber 4, so that the rail is extended to the outside of the inlet gate and the outlet gate of the processing chamber 4. In the processing chamber 4, a liquid mixed with abrasive powder is injected through plural nozzles 6a, 6b, 6c to conduct deburring. During the processing, the driving belts 2 sequentially feed the jig 3 and move the same to be processed. The processed jig 3 is accommodated in an unloader 7.