Title:
電子増倍体
Document Type and Number:
Japanese Patent JP6983956
Kind Code:
B2
Abstract:
To provide a manufacturing method of electronic multiplier capable of restraining temperature rise, and to provide an electronic multiplier.SOLUTION: A manufacturing method of electronic multiplier 2 includes a first step of preparing a body member 80 provided with a first communication hole 81 for first channel 21, and a second communication hole 82 for second channel 22, a second step of forming the first channel 21 and the second channel 22 by forming a sedimentary layer 85 including at least a resistive layer 83 on the external surface of the body member 80, the inner surface 81s of the first communication hole 81 and on the inner surface 82s of the second communication hole 82, and a third step of forming a body part 20 by removing a sedimentary layer 85 formed on the external surface of the body member 80.SELECTED DRAWING: Figure 13
Inventors:
Hiroyuki Kobayashi
Sugiura Ginji
Sugiura Ginji
Application Number:
JP2020122982A
Publication Date:
December 17, 2021
Filing Date:
July 17, 2020
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01J43/24
Domestic Patent References:
| JP2297857A | ||||
| JP3116626A | ||||
| JP5509192A | ||||
| JP2014086167A |
Foreign References:
| US4948965 | ||||
| US4967115 | ||||
| US5378960 | ||||
| WO2014050260A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama