Title:
Electrospray device
Document Type and Number:
Japanese Patent JP6292843
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device capable of efficiently forming a homogeneous amorphous organic thin film utilized for an organic electroluminescent element or the like using an electrospray (ES) method.SOLUTION: Disclosed is an electrospray device for forming a thin film which forms the thin film by charging a solution obtained by dissolving an organic material into a solvent and spraying such a solution as fine droplets. In the inside of a nozzle in a spray part, a taper is formed which tapers off toward the tip, the inner diameter of the tip is 20 to 50 μm, and a gradient angle of the taper is 1° to 6°.
Inventors:
Chihaya Adachi
Yasushi Koishikawa
Hiroshi Miyazaki
Yasushi Koishikawa
Hiroshi Miyazaki
Application Number:
JP2013242817A
Publication Date:
March 14, 2018
Filing Date:
November 25, 2013
Export Citation:
Assignee:
Nippon Steel & Sumikin Chemical Co., Ltd.
Kyushu University
Kyushu University
International Classes:
H05B33/10; B05B5/025; B05B5/08; H01L51/50
Domestic Patent References:
JP2010530795A | ||||
JP2013179028A | ||||
JP2013093139A | ||||
JP2005518278A |
Foreign References:
WO2006049333A1 | ||||
US20100155496 | ||||
WO2009131257A1 | ||||
WO2003072263A1 |
Attorney, Agent or Firm:
Kazuya Sasaki
Katsuo Naruse
Tomohiro Nakamura
Eiichi Sano
Katsuo Naruse
Tomohiro Nakamura
Eiichi Sano