To provide an electrostatic actuator capable of surely preventing a movable-side comb teeth electrode from displacing laterally, vertical to a moving direction, under an electrostatic force attraction using a return spring when turned on.
A fixed-side comb teeth electrode 1 is provided. A movable-side comb-teeth electrode 2 is formed movably in inserting or drawing-out direction relative to the fixed-side comb teeth electrode 1, and is attracted and inserted into the fixed-side comb teeth electrode 1 when a voltage is turned on. A return spring 3 returns the movable-side comb teeth electrode 2 to an initial state by elastically energizing it in the direction drawing out of the fixed-side comb teeth electrode 1 when voltage is turned off. The return spring 3 is formed oblong in the direction vertical to the moving direction of the movable-side comb teeth electrode 2. It is non-linear shape in the initial state when the movable-side comb teeth electrode 2 is drawn out of the fixed-side comb teeth electrode 1 when the voltage is turned off, while it deforms into almost linear shape when the movable-side comb teeth electrode 2 is inserted into the fixed-side comb teeth electrode 1 with an on-state voltage.
HIRATA KATSUHIRO
KAWADA HIROSHI
MITSUTAKE YOSHIO
HASEGAWA YUYA
Atsuo Mori