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Patent Searching and Data


Title:
ELECTROSTATIC ACTUATOR, MICROSWITCH, AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2009105031
Kind Code:
A
Abstract:

To provide an electrostatic actuator, a microswitch, and an electronic equipment capable of stabilizing motions of a membrane.

The electrostatic actuator comprises a suction electrode arranged on a substrate, the membrane arranged facing to the suction electrode, a first elastic beam arranged on the membrane and supporting the membrane, and a pulling section arranged on the membrane and pulling the membrane toward the suction electrode. The pulling section comprises an adsorption section electrostatically absorbed to the suction electrode, and a second elastic beam with its one end connected with the adsorption section. A rigidity of the second elastic beam is smaller than a rigidity of the first elastic beam.


Inventors:
KUBO HISASHI
MASUNAGA TAKAYUKI
Application Number:
JP2008141706A
Publication Date:
May 14, 2009
Filing Date:
May 29, 2008
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01H59/00; B81B3/00; H02N1/00
Attorney, Agent or Firm:
Masahiko Hinataji