Title:
ELECTROSTATIC ACTUATOR
Document Type and Number:
Japanese Patent JP2002218767
Kind Code:
A
Abstract:
To prevent generation of cracks at a thin area, such as a vibration plate, when a dicer sheet is attached to a substrate and is then cut at the time in a dicing process.
A distance t of separation between a dicing position 35 and the vibration plate 51 of a structure body having a thin area almost same as the vibration plate 51, is set to 100 μm or longer.
Inventors:
SATO KAZUHIKO
FURUTA MOTOAKI
FURUTA MOTOAKI
Application Number:
JP2001012004A
Publication Date:
August 02, 2002
Filing Date:
January 19, 2001
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/045; B41J2/055; B41J2/16; H02N1/00; (IPC1-7): H02N1/00; B41J2/045; B41J2/055; B41J2/16
Attorney, Agent or Firm:
Masanori Ueyanagi (1 outside)
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