Title:
ELECTROSTATIC ACTUATOR
Document Type and Number:
Japanese Patent JP3263971
Kind Code:
B2
Abstract:
PURPOSE: To increase pressure generated and displacement and also, reduce driving voltage so as to prevent dielectric breakdown by charging high- permittivity fluid having bubbles mixed or porous high-permittivity elastic substance into the space between a vibration plate and a counter electrode, in an electrostatic actuator which generates coulomb force and defaces the vibration plate.
CONSTITUTION: High-permittivity fluid 11 such as glycerine, nitrobenzene, etc., is charged into the space 5 between a counter electrode 4 and a vibration plate 3, when sealing it, by vacuum suction. Here, in the high-permittivity fluid 11, minute bubbles 12 of several microns are mixed at charge with a view to absorb volume change. Since the distance between the counter electrode 4 and the vibration plate 3 is minute at several microns, the bubbles 12 are never maldistributed by surface tension. What is more, in the case of having many mixed bubbles 12, the permittivity becomes small as a whole, and the output drops, so the quantity of mixed bubbles 12 shall be minimum within the range which fulfills required displacement.
Inventors:
Shuji Koeda
Application Number:
JP12215592A
Publication Date:
March 11, 2002
Filing Date:
May 14, 1992
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H02N1/00; B41J2/14; B81B3/00; H02N11/00; (IPC1-7): H02N1/00; H02N11/00
Domestic Patent References:
| JP3159584A | ||||
| JP421367A |
Attorney, Agent or Firm:
Masataka Ueyanagi
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