PURPOSE: To improve the damp-proof characteristic of a detector by providing a thin film resistor between an alumina base and an alumina diaphragm and feeding electricity all the time.
CONSTITUTION: The alumina base 11 and the alumina diaphragm 15 on its top surface are fixed at a specific interval by a spacer 13. A circular thin-film electrode 12 is provided at the center part of the base 11 and a circular thin-film electrode 14 is provided on the reverse surface of the diaphragm 15; and an annular thin-film resistor 17 is further provided at the periphery of the electrode 12. This resistor 17 is electrified all the time or when the abnormality of electrostatic capacity is detected to eliminate dew condensation on the electrodes 12 and 14, thereby obtaining accurate electrostatic capacity.
ITO SHUJI
SAKAMOTO KAZUHO
MIHARA MAKOTO
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