Title:
静電チャックおよびその製造方法
Document Type and Number:
Japanese Patent JP4312372
Kind Code:
B2
Abstract:
An electrostatic chuck including a dielectric layer made of aluminum nitride, an inner electrode buried in the dielectric layer, and a surface layer covering a surface of the dielectric layer. The surface layer is made of a material harder than the aluminum nitride constituting the dielectric layer and having a thickness of not less than 200 nm, and the surface of the dielectric layer has a center-line average surface roughness of not more than 25 nm. The electrostatic chuck is adapted to adsorb a wafer onto the dielectric layer through the surface layer.
Inventors:
Hideyoshi Tsuruta
Application Number:
JP2000376158A
Publication Date:
August 12, 2009
Filing Date:
December 11, 2000
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
B23Q3/15; H01L21/683; B23Q3/154; C23C16/44; C23C16/458; G03F7/20; H01L21/68; H02N13/00
Domestic Patent References:
| JP9045753A | ||||
| JP10256358A | ||||
| JP2000058631A | ||||
| JP2000260009A | ||||
| JP10064986A |
Attorney, Agent or Firm:
Kenji Sugimura
Nobuyuki Okajima
Kosaku Sugimura
Nobuyuki Okajima
Kosaku Sugimura