Title:
ELECTROSTATIC CHUCK AND PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2023035855
Kind Code:
A
Abstract:
To provide an electrostatic chuck and a processing apparatus capable of maintaining an effect of suppressing arc discharge for a long period of time.SOLUTION: An electrostatic chuck comprises: a bonding part provided between a substrate and a base plate; a gas introduction path having a first hole part located on the substrate, a second hole part located on the base plate, and a third hole part located on the bonding part; a counterbore part provided on the first hole part; a porous part, provided on the counterbore part, which has a first surface on the third hole part side and a second surface on the opposite side to the first surface; and an elastic body which is provided so as to face an end of the bonding part on the third hole part side. A lateral surface of the porous part has a first lateral part on the first surface side. In a region of the first lateral part making contact at least with the first surface, there is provided a first inclination part which is inclined. The first surface overlaps the bonding part and the elastic body. The porous part comes into contact with the elastic body at the first inclination part.SELECTED DRAWING: Figure 2
Inventors:
SASAKI YUKI
SHIRAISHI JUN
MOMIYAMA DAI
KONO REO
SHIRAISHI JUN
MOMIYAMA DAI
KONO REO
Application Number:
JP2022114206A
Publication Date:
March 13, 2023
Filing Date:
July 15, 2022
Export Citation:
Assignee:
TOTO LTD
International Classes:
H01L21/683; H01L21/3065; H02N13/00
Attorney, Agent or Firm:
Hyuga Temple Masahiko