Title:
静電チャック、基板固定装置
Document Type and Number:
Japanese Patent JP7411431
Kind Code:
B2
Abstract:
An electrostatic chuck is configured to adsorb and retain an object thereon. The electrostatic chuck includes: a base body on which the object is mounted; an electrostatic electrode that is provided in the base body; a plurality of heating elements that are provided in the base body; a plurality of current control elements that are provided in the base body, and each of which is connected in series with a corresponding one of the heating elements; and a control circuit that is provided in the base body, and that is connected to the current control elements and configured to control operations of the current control elements.
Inventors:
Hiroyuki Kobayashi
Akihiro Kuribayashi
Akihiro Kuribayashi
Application Number:
JP2020014637A
Publication Date:
January 11, 2024
Filing Date:
January 31, 2020
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
H01L21/683; H01L21/205; H01L21/3065; H02N13/00; H05B3/74
Domestic Patent References:
| JP2014112672A | ||||
| JP2019530208A | ||||
| JP2017216441A | ||||
| JP2019505092A | ||||
| JP2017163157A | ||||
| JP201584350A | ||||
| JP2019511111A |
Foreign References:
| US20160149482 | ||||
| WO2018016384A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito