Title:
ELECTROSTATIC CHUCK AND VACUUM TREATMENT DEVICE USING IT
Document Type and Number:
Japanese Patent JP3850527
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrostatic chuck for reducing transportation failures due to vibration and positional deviation of an attracted object on leaving, without losing the original capability of the electrostatic chuck.
SOLUTION: In an electrostatic chuck 7, a plurality of attraction electrodes 9a, 9b, 10a, and 10b are provided in an electrostatic chuck plate 8 consisting of a dielectric. A plurality of through-holes 13a, 13b, 13c, and 13d through which a support part 14a of a lift pin 14 can pass are provided at the electrostatic chuck plate 8. The through-holes 13a, 13b, 13c, and 13d are provided at a position passing through the electrodes 9a and 9b where a positive voltage is applied. Also, the through-holes 13a, 13b, 13c, and 13d are arranged on a concentric circle A with a radius r1 that is approximately half a radius r0 of the pattern of the electrodes 9 and 10, and its gravity part overlaps with that of a substrate 5 on the electrostatic chuck plate 8.
Inventors:
Ken Maedaira
Fuwa Tillage
Fuwa Tillage
Application Number:
JP25130397A
Publication Date:
November 29, 2006
Filing Date:
September 01, 1997
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B23Q3/15; H01L21/683; H01L21/68; H02N13/00; (IPC1-7): H01L21/68; B23Q3/15; H02N13/00
Domestic Patent References:
| JP9120987A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe
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