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Title:
ELECTROSTATIC CHUCK
Document Type and Number:
Japanese Patent JP2002345273
Kind Code:
A
Abstract:

To provide an electrostatic chuck capable of electrostatically attracting insulation substrates, such as glass substrates.

The electrostatic chuck 100 comprises a dielectric board 13 one face of which functions as an attraction face 11 for attracting insulation substrates and the other face of which is provided with a plurality of electrodes 12a and 12b; an insulation support board 14 which fixes the dielectric board 13; a plurality of conductive terminals 15a and 15b formed in the insulation support board 14; and means 16a and 16b for electrically connecting the electrodes 12a and 12b formed on the dielectric board 13 and the conductive terminals 15a and 15b. The area of the electrodes is less than 1/2 of the area of the attraction face.


Inventors:
HORI HIROAKI
TATENO NORIAKI
KITABAYASHI TETSUO
Application Number:
JP2001148780A
Publication Date:
November 29, 2002
Filing Date:
May 18, 2001
Export Citation:
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Assignee:
TOTO LTD
International Classes:
H01L21/683; H01L21/68; H02N13/00; (IPC1-7): H02N13/00; H01L21/68
Domestic Patent References:
JP2000348659A2000-12-15
JPH10233435A1998-09-02
JPH10233436A1998-09-02
JP2000332091A2000-11-30
JPH10223742A1998-08-21
JPH1064987A1998-03-06
JPH0774234A1995-03-17
JPH10189696A1998-07-21



 
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