Title:
ELECTROSTATIC CHUCK
Document Type and Number:
Japanese Patent JP3808286
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrostatic chuck, capable of completely preventing abnormal discharge as the cause of damages to the chuck, and damages to a board to be fixed or of generation of particles.
SOLUTION: A first insulating member 1 of a side for mounting at least the board to be fixed of the first insulating member 1 and a second insulating member 2 counterposed to pinch an electrode 3, is made of a complex sintered material containing silicon carbide particles and aluminum oxide particles of 4 to 12 wt.% as the main components. A volumetric specific resistance of the first member 1 becomes in the range of 1×109 to 1×1012 Ω.cm, when the potential difference between a surface 1A of the side for mounting the board of the member 1 is 1,000 V or lower or 1×107 to 1×108 Ω.cm, when the potential difference between the surface 1 of the side for mounting the board of the member 1 is 3,000 V or higher, and the member 1 has varistor characteristics.
Inventors:
Mamoru Kozakai
Application Number:
JP2000171028A
Publication Date:
August 09, 2006
Filing Date:
June 07, 2000
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
C04B35/111; H01L21/683; H01L21/205; H01L21/302; H01L21/3065; H02N13/00; (IPC1-7): H01L21/68; C04B35/111; H01L21/205; H01L21/3065
Domestic Patent References:
| JP9283607A | ||||
| JP9283606A | ||||
| JP10144779A | ||||
| JP5194023A | ||||
| JP63095644A | ||||
| JP64087552A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
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