Title:
ELECTROSTATIC DEFLECTOR
Document Type and Number:
Japanese Patent JP3862909
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce plastic deformation caused by thermal stress on an electrostatic partition wall due to the difference of thermal expansion between the material of the electrostatic partition wall and the material of the fixing frame of the electrostatic partition wall so as to enable baking at a high temperature and to reduce gas discharge.
SOLUTION: An electrostatic defector is equipped with a spacer 5 at a fixed position with a bolt 3b with a part projected from the fixing frame of the electrostatic partition wall higher than the thickness of the electrostatic partition wall and has a structure to absorb the difference of thermal expansion between the electrostatic partition wall and the fixing frame of the electrostatic partition wall at a high temperature for baking so as to generate no plastic deformation of the electrostatic partition wall.
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Inventors:
Hiromitsu Inoue
Application Number:
JP2000008750A
Publication Date:
December 27, 2006
Filing Date:
January 18, 2000
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H05H7/08; H05H7/10; H05H13/04; (IPC1-7): H05H7/08; H05H7/10; H05H13/04
Domestic Patent References:
| JP11176594A | ||||
| JP9166123A | ||||
| JP8250055A | ||||
| JP2076588U | ||||
| JP62112899U |
Attorney, Agent or Firm:
Hiroaki Tazawa
Konobu Kato
Konobu Kato