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Title:
ELECTROSTATIC DISCHARGING DEVICE
Document Type and Number:
Japanese Patent JPS63159880
Kind Code:
A
Abstract:

PURPOSE: To obtain an electrostatic discharging device which is improved in corrosion preventing function for etching, etc., and superior in long-period electrostatic charging and discharging by composing the 2nd dielectric layer of the device by an internal layer made of a raw material easily formed into a film, an intermediate layer made of a raw material with high electrostatic discharging performance, and an external layer made of a high-resistance raw material.

CONSTITUTION: On the surface of the 1st dielectric layer 2 of the electrostatic discharging device 1, 1st and 2nd electrodes 4 and 5 are provided and covered with the 2nd dielectric 3 so that they are buried in the dielectric 3. Further, a bare electrode 6 as a 3rd electrode connected to a DC bias power source 12 is provided on the surface of the dielectric 3. A member 7 to be charged electrostatically which has a conductive substrate 9 applied with a bias voltage is arranged nearby this electrode 6, and a photosensitive layer or dielectric layer 8 is provided on the substrate 9. Then the dielectric layer 3 is constituted in the three-layered structure of the internal layer 31 made of the raw material easily formed into the film, the intermediate layer 32 made of the raw material with high electrostatic discharging performance, and the external layer 33 made of the high-resistance raw material to improve the corrosion preventing function for etching, etc.


Inventors:
NAGASE YUKIO
Application Number:
JP30634386A
Publication Date:
July 02, 1988
Filing Date:
December 24, 1986
Export Citation:
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Assignee:
CANON KK
International Classes:
G03G15/02; H01T19/00; (IPC1-7): G03G15/02; H01T19/00
Attorney, Agent or Firm:
Fujioka Tohru



 
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