Title:
ELEMENT FOR DETECTING OPTICAL TYPE ABSOLUTE ENCODER
Document Type and Number:
Japanese Patent JPH04299216
Kind Code:
A
Abstract:
PURPOSE:To enable easy checkup of the presence or absence of a scratch trace on the surface of a detecting element from outside by forming a thin-film-shaped conductive route on a light-sensing surface. CONSTITUTION:A line-and-space-shaped wiring A of a pitch 10mum and a wire width 5mum which is formed of a transparent and conductive ITO(indium-tin oxide) film is provided on the outermost layers of light-sensing surfaces of twelve phototransistors S1 to S12 formed at a pitch of 10mum continuously on a silicon substrate B. The wiring A is provided zigzag to avoid the light-sensing areas of the transistors S1 to S12 and the opposite ends of the wiring A are connected to terminals A1 and A2 respectively. By measuring a resistance value between these terminals A1 and A2, the presence or absence of a scratch trace on the light-sensing surfaces of the transistors S1 to S12 can be judged.
Inventors:
ONO YASUSHI
MATSUMOTO TAKESHI
MATSUMOTO TAKESHI
Application Number:
JP8739791A
Publication Date:
October 22, 1992
Filing Date:
March 28, 1991
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01D5/249; G01D5/36; (IPC1-7): G01D5/249; G01D5/36
Attorney, Agent or Firm:
Masatoshi Sato (1 person outside)