Title:
ELEMENT AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2022170866
Kind Code:
A
Abstract:
To provide a manufacturing method of an element which enables improvement of operation characteristics.SOLUTION: A manufacturing method of an element 1 includes: a step in which an alignment mark 3 formed of a non-transparent material is formed on a front surface of a substrate 2 formed of glass; a step in which a transparent film is formed on a rear surface of the substrate 2; a step in which positioning is performed from the rear surface of the substrate 2 by using the alignment mark 3 to form a resist pattern on the transparent film; a step in which the resist pattern is used as a mask to etch the transparent film and form an alignment mark 4; a step in which a protection film formed of a non-transparent material is formed on the alignment mark 4; a step in which positioning is performed from the rear surface of the substrate 2 by using the alignment mark 4 and the protection film on the alignment mark 4 to form a resist pattern on the protection film; and a step in which the resist pattern is used as a mask to etch the protection film.SELECTED DRAWING: Figure 1
Inventors:
CHIKAMORI HIROYUKI
MATSUMOTO TAKUYA
MATSUMURA AKITO
MATSUMOTO TAKUYA
MATSUMURA AKITO
Application Number:
JP2021077134A
Publication Date:
November 11, 2022
Filing Date:
April 30, 2021
Export Citation:
Assignee:
TOPPAN PRINTING CO LTD
International Classes:
B81C1/00; B81B3/00; H04R19/04; H04R31/00
Attorney, Agent or Firm:
Masatoshi Kurata
Nobuhisa Nogawa
Tadashi Inoue
Naoki Kono
Shigeru Iino
Sanae Kaneko
Nobuhisa Nogawa
Tadashi Inoue
Naoki Kono
Shigeru Iino
Sanae Kaneko