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Title:
ELLIPSOMETER
Document Type and Number:
Japanese Patent JP2013053921
Kind Code:
A
Abstract:

To provide an ellipsometer capable of accurately measuring a measuring object in vacuum atmosphere, and even when an optical fiber is attached/detached, capable exerting no influence on measurement accuracy.

A light projection part 13 and a light receiving part 14 are arranged on the inside of a housing 11, a light-emitting device 12 is arranged on the outside of the housing 11, and the light-emitting device 12 and the light projection part 13 are optically connected to each other by an optical wiring device 18. When the light projection part 13 polarizes incident light to generate measurement light and applies the measurement light to a measuring object 7 and the light receiving part 14 receives reflected light and sends the received reflected light to an analyzer 15 arranged on the outside of the housing 11, the analyzer 15 finds film thickness. Thus, the measuring object 7 can be measured in vacuum atmosphere, and even when the optical wiring device 18 and the light projection part 13 are attached/detached, these units can be temporarily fixed relatively on the same positions and the attachment/detachment does not exert influence on the measurement accuracy.


Inventors:
CHIN YOSHI
Application Number:
JP2011192145A
Publication Date:
March 21, 2013
Filing Date:
September 02, 2011
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01J4/04; C23C14/52; G01B11/06
Domestic Patent References:
JP2011519475A2011-07-07
JP2010014628A2010-01-21
JPH11162954A1999-06-18
JPH06230316A1994-08-19
JPH0524181A1993-02-02
JPH06342114A1994-12-13
Other References:
JPN6015008609; 陳凱ほか: '小型高速分光エリプソメータ「UNECS-2000」の開発' ULBAC Technical Journal No.74, 20110218, 16-18頁
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe