Title:
端面修正治具および端面修正方法
Document Type and Number:
Japanese Patent JP6486785
Kind Code:
B2
Inventors:
Satoshi Okawara
Application Number:
JP2015138165A
Publication Date:
March 20, 2019
Filing Date:
July 09, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B27/06; H01L21/301
Domestic Patent References:
| JP2011224666A | ||||
| JP2011255458A | ||||
| JP2009297855A | ||||
| JP2014093384A | ||||
| JP2002009019A | ||||
| JP2014116432A |
Attorney, Agent or Firm:
Hiroaki Sakai