Title:
ENGINEERED SUBSTRATE CONSTRUCTION FOR POWER AND RF APPLICATIONS
Document Type and Number:
Japanese Patent JP2023017856
Kind Code:
A
Abstract:
To provide improved method and system related to an epitaxial growth process and a substrate structure.SOLUTION: A designed substrate structure includes a ceramic substrate including a polycrystalline material and having a front surface having a plurality of voids, a barrier layer 118 encapsulating the ceramic substrate and defining valleys corresponding to the plurality of voids, a first bonding layer 120 including a bonding layer material, bonded to the barrier layer over the front surface of the ceramic substrate, and defining a fill region in which valleys corresponding to the plurality of voids are filled with the bonding layer material, a second bonding layer bonded to the first bonding layer, and a single crystal layer 125 bonded to the second bonding layer.SELECTED DRAWING: Figure 1A
Inventors:
Odonoblyudov, Vladimir
Baseri, sem
Fur lenses, shari
Baseri, sem
Fur lenses, shari
Application Number:
JP2022173496A
Publication Date:
February 07, 2023
Filing Date:
October 28, 2022
Export Citation:
Assignee:
Chromis, Inc.
International Classes:
H01L21/02; B32B18/00; H01L21/20
Domestic Patent References:
| JP2006517734A | 2006-07-27 | |||
| JP2012197213A | 2012-10-18 | |||
| JP2016072450A | 2016-05-09 | |||
| JP2010502023A | 2010-01-21 | |||
| JP2008538658A | 2008-10-30 |
Attorney, Agent or Firm:
Noriaki Okabe
Hitoshi Aiba
Hitoshi Aiba
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