Title:
ガス放電プラズマに基づく短波長光線の生成のための装置および冷却剤搬送電極ハウジングの製作方法
Document Type and Number:
Japanese Patent JP4328798
Kind Code:
B2
Abstract:
The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.
Inventors:
Sven Getz
Halalt abel
Jürgen Kleinschmidt
Im Chiatz Ahmad
Halalt abel
Jürgen Kleinschmidt
Im Chiatz Ahmad
Application Number:
JP2006311556A
Publication Date:
September 09, 2009
Filing Date:
November 17, 2006
Export Citation:
Assignee:
Extreme Technologies Gesellschaft Mitt Beschlenktel Haftung
International Classes:
H05G2/00; H01J7/24; H01L21/027
Domestic Patent References:
| JP7282992A | ||||
| JP2003218025A |
Foreign References:
| US20040145292 |
Attorney, Agent or Firm:
Fujita Akira