Title:
EQUIPMENT FOR MAKING ENLARGED IMAGE OF RETICLE PATTERN
Document Type and Number:
Japanese Patent JPS59121933
Kind Code:
A
Abstract:
PURPOSE:To realize the formation of an enlarged image of a reticle with an optional size without demanding an enormous floor area by a method wherein a light beam is applied to a rectile pattern while it is being scanned and the light which passes through is converted into an electric signal and the signal is converted into an image with an optional size. CONSTITUTION:A radiated light beam 5 from a light source 1 is applied to a reticle 2 while it is being scanned by a scanning mirror 9. The light 6 which passes the rectile 2 is received by a detector 4 through a convex lens 3 as a light signal produced in accordance with light and shade of the pattern. An electric output signal 8 from the detector 4 is the output signal corresponding to the pattern of the reticle 2. The electric signal 8 is, then, converted into an image by an image converter 7 and the image analogous to the pattern of the reticle 2 is obtained. If an equipment such as an electrostatic plotter is introduced, an enlarged image of the reticle pattern with an arbitrary size can be obtained easily.
Inventors:
KAWASAKI FUMINORI
Application Number:
JP22899782A
Publication Date:
July 14, 1984
Filing Date:
December 28, 1982
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G03F1/00; G03F1/84; H01L21/027; H01L21/66; (IPC1-7): H01L21/30; G03F1/00
Attorney, Agent or Firm:
Uchihara Shin