Title:
少なくとも1つの被処理物を熱処理するための装置及び方法
Document Type and Number:
Japanese Patent JP4488155
Kind Code:
B2
Abstract:
A method and for heat-treating at least one material being processed (3) under a specific process-gas atmosphere (111) of at least one process gas (4) with the aid of a heat-treatment unit (6). The heat-treatment unit has at least one energy source (5) for making the material being processed (3) take up an amount of energy, a heat-treatment container (11) with a heat-treatment space (16) for keeping the material being processed (3) under the process-gas atmosphere (111) during the heat treatment, a heat-treatment chamber (13), in which the heat-treatment container (11) is arranged at a distance (18) from the heat-treatment chamber (13), so that there is an intermediate space (14) between the heat-treatment container (11) and the heat-treatment chamber (13), and an element (19, 191) for producing in the intermediate space (14) a further gas atmosphere (141) of a further gas, different from the process-gas atmosphere (111).
Inventors:
Volker Prost
Application Number:
JP2001531148A
Publication Date:
June 23, 2010
Filing Date:
October 20, 2000
Export Citation:
Assignee:
Shell Erneuerbare Energien GmbH
International Classes:
F27B17/00; F27D7/06; H01L21/00; H01L31/04
Domestic Patent References:
| JP1285787A | ||||
| JP62130394U | ||||
| JP453197U | ||||
| JP7115216A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Einzel Felix-Reinhard
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Einzel Felix-Reinhard