Title:
フレキシブル基板を有する装置
Document Type and Number:
Japanese Patent JP5852150
Kind Code:
B2
Abstract:
Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor the platform temperature. Fabricating the resonator on a relatively low cost flexible polymer substrate rather than silicon provides mechanical flexibility as well as design flexibility with respect to sensor placement. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.
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Inventors:
Abdelmoneum, Mohammed A.
Kaysen, David A.
Kaysen, David A.
Application Number:
JP2014018190A
Publication Date:
February 03, 2016
Filing Date:
February 03, 2014
Export Citation:
Assignee:
INTEL CORPORATION
International Classes:
B81B7/02; G01K7/00; H05K1/02
Domestic Patent References:
| JP2006258520A | ||||
| JP2009097951A | ||||
| JP2009272757A | ||||
| JP9204962A | ||||
| JP1145539A |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation