Title:
ESTIMATION DEVICE AND PRESSURE CONTROL VALVE
Document Type and Number:
Japanese Patent JP2020009111
Kind Code:
A
Abstract:
To provide an estimation device capable of estimating a proper plant parameter on which an actual device condition is reflected.SOLUTION: An arithmetic unit 22 estimates a plant parameter of a vacuum chamber 3 (for example, a volume Vc of the vacuum chamber 3 or a time constant Vg/Cg). The arithmetic unit 22 estimates the volume Vc of the vacuum chamber 3 on the basis of a pressure rise time constant Tup of a pressure measurement value Pg, which is observed by decreasing a pressure control valve 1 from a first aperture to a second aperture when a gas of a predetermined flow Qin is flowing into the vacuum chamber 3, and a pressure fall time constant Tdown of the pressure measurement value Pg which is observed by increasing the pressure control valve 1 from the second aperture to the first aperture when the gas of the predetermined flow Qin is flowing into the vacuum chamber 3.SELECTED DRAWING: Figure 1
Inventors:
HIRATA NOBUYUKI
Application Number:
JP2018129154A
Publication Date:
January 16, 2020
Filing Date:
July 06, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G05D16/20; G01F22/02
Attorney, Agent or Firm:
Fuyuki Nagai