Title:
EVACUATION DEVICE AND EVACUATION METHOD
Document Type and Number:
Japanese Patent JP2019173613
Kind Code:
A
Abstract:
To provide an evacuation device having a good exhaust property of water molecules.SOLUTION: An evacuation device 1 comprises a moisture absorption chamber 3 arranged between a vacuum chamber 2 and a vacuum pump 4, and a gate valve 8 arranged between the vacuum chamber 2 and the moisture absorption chamber 3. A moisture absorption unit 12 composed of a moisture absorption/desorption agent 17 is arranged inside the moisture absorption chamber 3. The moisture absorption/desorption agent 17 has a property of absorbing moisture at an ordinary temperature and desorbing the moisture at a predetermined reference temperature higher than the ordinary temperature.SELECTED DRAWING: Figure 1
Inventors:
TAIMA YASUSHI
KARIMATA TSUTOMU
SOFUGAWA TAKUJI
KARIMATA TSUTOMU
SOFUGAWA TAKUJI
Application Number:
JP2018061070A
Publication Date:
October 10, 2019
Filing Date:
March 28, 2018
Export Citation:
Assignee:
EBARA CORP
International Classes:
F04D19/04; F04B37/20; F04D29/70
Domestic Patent References:
| JPH02294573A | 1990-12-05 | |||
| JP2014169617A | 2014-09-18 | |||
| JPH04358515A | 1992-12-11 | |||
| JPS6352255U | 1988-04-08 | |||
| JP2002534654A | 2002-10-15 | |||
| JP2017020737A | 2017-01-26 | |||
| JPH06224495A | 1994-08-12 | |||
| JPS6477445A | 1989-03-23 | |||
| JP2000070661A | 2000-03-07 | |||
| JP2002200425A | 2002-07-16 |
Foreign References:
| CN203235401U | 2013-10-16 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto