Title:
EVACUATION SYSTEM
Document Type and Number:
Japanese Patent JP3227105
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable reuse of material gas being contained in the exhaust gas, and simultaneously to reduce the burden of an exhaust gas disposal unit, and further to make such a possibility that PFC of the like has been emitted in the atmosphere so as to be preventable from occurring.
SOLUTION: Two vacuum pumps 14a and 14b are installed in series in an evacuating path 12 evacuating an airtight chamber 10, while a trap unit 20, having a trap chamber 32a trapping the constituent elements of exhaust gas and a regenerating chamber 34a regenerating the trapped elements in the trap part 18, is installed in a pileline 16 connecting both these vacuum pumps to each other, and further this evacuation system is provided with a regenerated gas circulating path 22 returning the regenerated gas made up in the regenerating chamber to the airtight chamber.
Inventors:
Tetsuro Sugiura
Nomura Norihiko
Shinji Noji
Nomura Norihiko
Shinji Noji
Application Number:
JP8875497A
Publication Date:
November 12, 2001
Filing Date:
March 24, 1997
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B37/16; H01L21/02; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): F04B37/16; H01L21/205
Domestic Patent References:
| JP5226346A |
Attorney, Agent or Firm:
Isamu Watanabe (2 outside)