PURPOSE: To separate respective items of distribution functions for irradiation intensity consisting of multivariate and multi-item functions so as to evaluate each parameter individually.
CONSTITUTION: A plurality of evaluation patterns 3 and compensation patterns 4 for γ and Cγ are drawn by a positive resist and, when a minimum accumulation energy in which the patterns disappear after they are developed is given onto a observation point 1, the compensation patterns 4 are arranged as to compensate the contribution to the accumulation energy at the point 1 from the items other than the γ item in a manner that respective accumulation energies at the point 1 in the case where the evaluation patterns 3 are drawn by changing at least two or more conditions out of figure's dimension, arrangement and irradiation quantity will be equivalent to the contribution to the accumulation energy at the point 1 according to the γ item.
OKI SHIGEHISA
MATSUDA KOREHITO
