Title:
レーザー加工装置の高さ位置検出ユニットの評価用治具及びレーザー加工装置の高さ位置検出ユニットの評価方法
Document Type and Number:
Japanese Patent JP6955893
Kind Code:
B2
Abstract:
Disclosed herein is an evaluation jig that is a jig to be used for evaluation of a height position detection unit that detects the height position of a holding surface of a chuck table of a laser processing apparatus. The evaluation jig includes a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a Z-axis direction, a base section that supports the actuator and is mounted on the holding surface of the chuck table, and a control unit that controls movement of the actuator.
Inventors:
Kenji Furuta
Application Number:
JP2017086311A
Publication Date:
October 27, 2021
Filing Date:
April 25, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23K26/70; B23K26/03; B23K26/046; G01B21/00
Domestic Patent References:
| JP2005028423A | ||||
| JP2000263261A | ||||
| JP2005193284A | ||||
| JP2016095297A | ||||
| JP2002328309A |
Attorney, Agent or Firm:
Sakai International Patent Office