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Patent Searching and Data


Title:
EVAPORATION DEVICE FOR METAL
Document Type and Number:
Japanese Patent JPH03226566
Kind Code:
A
Abstract:

PURPOSE: To prevent the decrease in the vacuum degree in an electron gun for heating the metal housed in a crucible for evaporation by providing a cold trap, etc., in the exit port of the electron gun so that the evaporated metal intending to infiltrate into inside of the electron gun can be trapped.

CONSTITUTION: This evaporating device for the metal has the crucible 3 for evaporation, the electron gun 4 for heating the evaporating metal 2 housed therein and a device for recovering the evaporated metal to recover the evaporated metal 7 in a vacuum vessel 1. The cold trap 10 is provided in the exit port 4a of the above-mentioned electron gun 4 and the direct intrusion of the mists of the metal and sputtering particles flying from the above-mentioned crucible into the exit port 4a of the electron gun 4 is prevented by a baffle plate 12 provided in this trap 10. The decrease in the vacuum degree in the electron gun 4 is thus prevented.


Inventors:
KUWAKO AKIRA
Application Number:
JP1884090A
Publication Date:
October 07, 1991
Filing Date:
January 31, 1990
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B01D59/04; C23C14/30; (IPC1-7): B01D59/04; C23C14/30
Attorney, Agent or Firm:
Hisano Hatano (1 person outside)