Title:
EVAPORATION DEVICE
Document Type and Number:
Japanese Patent JPS5391023
Kind Code:
A
Inventors:
KAGA HIROMASA
Application Number:
JP593577A
Publication Date:
August 10, 1978
Filing Date:
January 24, 1977
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23C14/24; C23C14/30; (IPC1-7): C23C13/08