Title:
蒸発装置
Document Type and Number:
Japanese Patent JP2659834
Kind Code:
B2
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Inventors:
KUBO SHINGO
SATO AKIRA
SATO AKIRA
Application Number:
JP31650289A
Publication Date:
September 30, 1997
Filing Date:
December 07, 1989
Export Citation:
Assignee:
MITSUBISHI JUKOGYO KK
International Classes:
B01D1/00; (IPC1-7): B01D1/00
Attorney, Agent or Firm:
長瀬 成城 （外２名）